[Analysis Insight] KoMiCo’s Property Analysis Solutions for More Reliable Semiconductor Equipment Parts
Semiconductor processes are carried out in extreme environments involving repeated exposure to high temperatures, plasma, and chemical reactions. Under these conditions, equipment and parts may gradually wear over time or experience changes in surface properties, directly affecting process stability and yield.
KoMiCo has established its own analysis center to identify potential abnormalities in products and develop optimal response measures through specialized physical property analysis solutions. Through these efforts, KoMiCo contributes to securing the quality and reliability of semiconductor equipment parts.
■ KoMiCo Physical Property Analysis Equipment Line-up
SEM is an instrument that forms images by irradiating an electron beam onto the surface of a sample and detecting the secondary electrons (SE) and backscattered electrons (BSE) generated in the process. It enables high-resolution observation of a sample’s microscopic surface structure, as well as the uniformity and morphology of coating layers, making it essential for identifying the root causes of process-related issues.
In addition, EDS detects characteristic X-rays generated during electron beam irradiation, enabling qualitative and quantitative analysis of the elemental composition of the sample. This allows KoMiCo to identify not only the composition of contaminants but also the composition of coating layers.
KoMiCo has obtained KOLAS (Korea Laboratory Accreditation Scheme) accreditation for its SEM-EDS analysis equipment, officially recognizing its analytical capabilities in accordance with international standards. Based on this accreditation, KoMiCo provides customers with objective and highly reliable analytical data.
In addition to SEM-EDS, KoMiCo is equipped with a wide range of instruments to evaluate the physical properties of semiconductor equipment parts and materials from multiple perspectives.
- Nano Indenter: An instrument that evaluates hardness, elastic modulus, and other mechanical properties by measuring load and depth at the nanometer scale. It is optimized for verifying the mechanical properties of ultra-thin coatings and nanostructures.
- Vickers Hardness Tester: An instrument that measures material hardness using a diamond pyramid indenter. It is used to evaluate the wear resistance of metal substrates and coating layers.
- NPM II: An instrument that non-destructively measures coating thickness by analyzing the refractive index of reflected light. It enables rapid verification of coating thickness uniformity during the process.
KoMiCo Analysis Center’s physical property analysis solutions precisely diagnose various physical characteristics of parts, including surface structure, hardness, and coating thickness. Through these capabilities, KoMiCo provides practical support for process optimization and problem-solving, contributing to improved equipment operation stability and yield for customers.
Moving forward, KoMiCo will continue to provide customized analysis solutions that meet customer requirements, based on its advanced analytical technologies and accumulated expertise.
<About KoMiCo>
KoMiCo, established in 1996, was the first company in Korea to commercialize cleaning and coating services for semiconductor equipment components. With global operations spanning the United States, China, Taiwan, and Singapore, KoMiCo has earned quality certifications from some of the world’s leading semiconductor manufacturers, solidifying its position as a Global No.1 in the industry.
Building on its advanced cleaning and coating technologies, KoMiCo continues to enhance its core business while expanding into the development and supply of key OEM components for semiconductor equipment. Moving forward, the company remains committed to improving customers’ productivity and yield, and aims to become a global leader in the semiconductor component cleaning, coating, and manufacturing industry.
