[Analysis Insight] KoMiCo Particle Analysis Technology for Verifying Semiconductor Cleanliness
KoMiCo Analysis Center is equipped with a wide range of specialized particle analysis instruments to precisely analyze residual particles on products after cleaning and coating processes, thereby supporting process stability.
■ KoMiCo Particle Analysis Equipment Line-up
- PSM (Particle Solution Machine)
PSM is an analysis instrument independently developed by KoMiCo. It precisely detects residual particles inside the holes of semiconductor equipment parts.
The inside of a hole has a fine and complex structure, making cleanliness control highly challenging. To overcome these structural limitations, KoMiCo has developed its own PSM measurement equipment and performs detailed analysis.
By injecting gas into the hole at high pressure, PSM identifies residual particles at the 0.1 μm level. Based on this data, KoMiCo establishes optimized cleaning recipes, contributing to improved process stability for customers.
- SPD (Surface Particle Detector)
SPD is another instrument independently developed by KoMiCo.
It measures residual particles at the 0.1 μm level remaining on the surface of semiconductor equipment parts by lifting them into suspension. By verifying the cleanliness of parts surfaces after the cleaning process, SPD helps minimize the possibility of particle generation during customer processes and enhances process stability.
- LPC (Liquid Particle Counter)
LPC is an instrument that measures the relative size and number of fine particles suspended in ultra-pure water (UPW). When a laser is irradiated into the solution, light is scattered by the particles, and the instrument detects this scattered light to analyze particle size and count.
These instruments can be applied under various conditions, including inside holes, on surfaces, and in liquid environments. Through these capabilities, KoMiCo ensures the cleanliness of parts and proactively prevents potential risks that may arise during semiconductor processes.
Moving forward, KoMiCo will continue to contribute to improving quality and reliability in the semiconductor industry based on its advanced analysis equipment and accumulated expertise.
<About KoMiCo>
KoMiCo, established in 1996, was the first company in Korea to commercialize cleaning and coating services for semiconductor equipment components. With global operations spanning the United States, China, Taiwan, and Singapore, KoMiCo has earned quality certifications from some of the world’s leading semiconductor manufacturers, solidifying its position as a Global No.1 in the industry.
Building on its advanced cleaning and coating technologies, KoMiCo continues to enhance its core business while expanding into the development and supply of key OEM components for semiconductor equipment. Moving forward, the company remains committed to improving customers’ productivity and yield, and aims to become a global leader in the semiconductor component cleaning, coating, and manufacturing industry.
