[Analysis Insight] KoMiCo’s Functional Evaluation Technology for Verifying the Performance of Equipment Parts
Semiconductor manufacturing processes are carried out under harsh conditions involving high temperatures, chemicals, and plasma.
During these processes, the functionality of semiconductor manufacturing equipment parts may be degraded or lost. In particular, the surface condition and hole size of parts are critical evaluation factors that must be carefully managed to ensure stable process performance in semiconductor manufacturing.
KoMiCo Analysis Center systematically performs functional evaluations of these key factors. By precisely measuring the flatness, surface morphology, roughness, and hole size of parts, KoMiCo verifies whether the parts maintain the functionality and stability required for the process environment.
■ KoMiCo Functional Evaluation Analysis Equipment Line-up
- CMM (Coordinate Measuring Machine)
In the harsh environments of semiconductor manufacturing processes, dimensional changes or deformation of parts may occur. CMM is a contact-type analysis instrument that precisely measures the actual geometry of a product in three dimensions using a probe. Through this, KoMiCo can evaluate functional stability, including product deformation.
In addition, based on long-term accumulated measurement data, KoMiCo analyzes the trend of deformation accumulation according to the number of uses and predicts the lifecycle of parts.
This data-driven management system plays an important role in enhancing the stability and reliability of customer processes.
- 3D Map
3D Map is an instrument that uses a laser light source to observe the sample surface three-dimensionally. By magnifying and observing the surface of parts in 3D, it enables visual identification of roughness, cracks, and micro-defects, and is mainly used for quality control of coated parts.
In particular, its non-contact 3D measurement method allows precise analysis of surface conditions without damaging the product.
- SureInspect
SureInspect is a vision-based, three-dimensional non-contact measurement instrument that scans parts using optical sensors to extract precise coordinate data.
It delivers excellent performance in inspecting parts with complex structures or shower heads containing thousands of micro-holes, as it can quickly and accurately measure hole diameter, position, depth, and other key features.
Through a highly repeatable automated measurement method, SureInspect enables uniform quality inspection of large quantities of parts. Unlike contact-type equipment, it can secure precise data without the risk of damage.
It also allows rapid verification of hole blockage or dimensional changes after cleaning and coating processes, significantly improving the stability and quality reliability of customer processes.
KoMiCo’s functional evaluation verifies whether parts can perform reliably in actual semiconductor process environments.
Moving forward, KoMiCo will continue to expand its advanced measurement equipment and analytical capabilities, setting new standards for functional evaluation of semiconductor equipment parts and shaping the future of the semiconductor industry together with its customers.
<About KoMiCo>
KoMiCo, established in 1996, was the first company in Korea to commercialize cleaning and coating services for semiconductor equipment components. With global operations spanning the United States, China, Taiwan, and Singapore, KoMiCo has earned quality certifications from some of the world’s leading semiconductor manufacturers, solidifying its position as a Global No.1 in the industry.
Building on its advanced cleaning and coating technologies, KoMiCo continues to enhance its core business while expanding into the development and supply of key OEM components for semiconductor equipment. Moving forward, the company remains committed to improving customers’ productivity and yield, and aims to become a global leader in the semiconductor component cleaning, coating, and manufacturing industry.
