[Analysis Insight] KoMiCo Chemical Analysis Detecting Even Invisible Contaminants
Semiconductor process equipment and parts are exposed to various chemical environments, including plasma, acid and alkaline solutions, and reactive gases. During this process, chemical changes on the surface of parts can lead to equipment performance degradation or process imbalance.
Therefore, chemical analysis of equipment parts is essential to ensure process stability and product reliability. KoMiCo Analysis Center provides customer-specific analysis services based on a wide range of advanced chemical analysis instruments.
■ KoMiCo Chemical Analysis Equipment Line-up
One of the representative chemical analysis instruments at KoMiCo Analysis Center is ICP-MS (Inductively Coupled Plasma Mass Spectrometer).
ICP-MS is an instrument that uses high-temperature plasma to evaporate and ionize atoms in a sample, then detects the number of ions with specific masses through a mass analyzer. It can measure the concentration of metal ions in a sample down to the ppt (10⁻¹²) level, enabling accurate monitoring of even trace metal contamination generated during semiconductor processes.
KoMiCo has obtained KOLAS accreditation for its ICP-MS analysis equipment, ensuring data quality that meets international standards. This allows KoMiCo to provide customers with more objective and reliable analysis results.
- IC (Ion Chromatography): An instrument that separates and quantitatively analyzes cations and anions contained in a sample. It precisely detects ionic components within materials and is used to evaluate cleanliness and stability.
In addition to ICP-MS, KoMiCo operates a range of instruments capable of evaluating the chemical properties of samples from multiple perspectives.
- FT-NIR (Fourier Transform Near-Infrared Spectroscopy): An instrument that quantifies the composition ratio of a sample through near-infrared spectroscopic analysis.
- TOC (Total Organic Carbon Analyzer): An instrument that evaluates contamination levels, cleanliness, and compliance with quality standards by oxidizing and decomposing carbon components contained in organic substances within a sample and measuring their concentration.
- Potentiometric Titrator: An instrument that calculates concentration and composition based on changes in electric potential generated during titration reactions.
KoMiCo’s chemical analysis precisely detects even trace levels of metals, ions, and organic substances. Through these capabilities, KoMiCo plays an important role in process contamination control and quality assurance.
Moving forward, KoMiCo will continue to provide customized chemical analysis solutions that meet customer requirements, based on its advanced analytical technologies and accumulated expertise, contributing to enhanced cleanliness and reliability in the semiconductor industry.
<About KoMiCo>
KoMiCo, established in 1996, was the first company in Korea to commercialize cleaning and coating services for semiconductor equipment components. With global operations spanning the United States, China, Taiwan, and Singapore, KoMiCo has earned quality certifications from some of the world’s leading semiconductor manufacturers, solidifying its position as a Global No.1 in the industry.
Building on its advanced cleaning and coating technologies, KoMiCo continues to enhance its core business while expanding into the development and supply of key OEM components for semiconductor equipment. Moving forward, the company remains committed to improving customers’ productivity and yield, and aims to become a global leader in the semiconductor component cleaning, coating, and manufacturing industry.
